General Information

Do not use these products to sense liquid flow. Failure to comply with these instructions may result in product damage.

Do not dissemble these products. Failure to comply with these instructions may result in product damage.


  • Avoid cleaning the sensor; however, if it must be cleaned, use is propyl alcohol and dry the device thoroughly before use. Cap the ports or connect housing to the ports before cleaning the sensor with alcohol. Using alcohol may remove the text on the sensor label; however, the label ID is hard-coded inside the sensor.
  • Do not use III Tri-chloromethane, methylene chloride, methyl pyridine, or any oxidizing type acid such as formic acid.
  • Do not use ultrasonic cleaning. Failure to comply with these instructions may result in product damage.


Materials Specifications
Wetted materialsglass reinforced (GR) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy, PCB epoxy composite
HousingGR thermoplastic polymer
Electronic componentssilicon, gold
ComplianceRoHS, WEEE
Environmental Specifications
Humidity0% to 95% RH, non-condensing
Shock30 g, 6 ms
Vibration1.33 g at 10 Hz to 500 Hz
ESDESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV
Radiated immunity:
20 , 50, 100 , 200, 300 SLPM
10, 15 SLPM
Level 3 from 80 MHz to 1000 MHz per IEC61000-4-3
1 m shielded cable with 3 cm exposed leads at connector
1 m shielded cable with 3 cm exposed leads at connector and 280 Ohm at MHz ferrite bead
Recommended Mounting and Implementation
Recommended Mounting and Implementation
Mounting screw size10-32
Mounting screw torque1,13 N m [20 in-lb]
Electrical connection6 pin SIP connector
Pneumatic connectionmanifold mount, 22 mm OD tapered male fitting, G 3/8 female threaded fitting
Absolute Maximum Ratings1
Absolute Maximum Ratings1
Supply voltage-0.3 Vdc to 11.0 Vdc
Voltage on digital I/O output pins-0.3 Vdc to 3.0 Vdc2
Storage temp. range-40°C to 100°C [-40°F to 212°F]
Maximum flow change10,000 SLPM/s
Maximum common mode pressure4 bar | 60 psi at 25°C [77°F]
Maximum flow350 SLPM
  1. Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanical characteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily operate at absolute maximum ratings.
  2. Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to 2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors
Operating Specifications
Operating Specifications
Supply voltage3 Vdc to 10 Vdc
Supply current20 mA max.
Power: 3 Vdc
10 Vdc
60 mW max.
200 mW max.
Calibrated temperature range10°C to 50°C [32°F to 122°F]
Operating temperature range-20°C to 70°C [-4°F to 158°F]
Full scale (FS) flow210, 15, 20, 50, 100, 200, 300 SLPM
Calilbrated flow range0 to 10, 0 to 15, 0 to 20, 0 to 50, 0 to 100, 0 to 200, 0 SLPM to 300 SLPM
Calibration gasclean, dry air
0%FS to 14.3%FS
14.3%FS to 100%FS
Total Error Band:4
10, 15, 20, 50, 100, 200 SLPM:
0%FS to 12.5%FS
12.5%FS to 100%FS
300 SLPM only: 0%FS to 12.5%FS
12.5%FS to 66.7%FS
66.7%FS to 100%FS
4.0%reading 7.0%reading
Null accuracy5±0.5%FS
Flow response time61 ms
Warm up time735 ms
Resolution: 10 SLPM
100 SLPM
200 SLPM
300 SLPM
0.02     SLPM
0.03     SLPM
0.003 SLPM
0.008 SLPM
0.015 SLPM
0.029 SLPM
0.043 SLPM
Proof pressure10.3 bar | 150 psig
Burst pressure13.7 bar | 200 psig
Bus standards8I2C fast mode (up to 400 kHz)
Reverse polarity protectionno
  1. Custom and extended temperature compensated ranges are possible. Contact Honeywell for details.
  2. Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0°C and 1 atm. Custom units are given as LPM with listed reference conditions at the first mention.
  3. Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25ºC. Errors include Offset, Full Scale Span, Linearity, Flow Hysteresis, and Repeatability.
  4. Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band includes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature Span and Thermal Hysteresis.
  5. Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range.
  6. Response time: time to electrically respond to any mass flow change at the micro bridge airflow transducer (response time of the transducer may be affected by the pneumatic interface).
  7. Warm-up time: time to the first valid flow measurement after power is applied.
  8. Refer to the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors” for I2C protocol information.

Accuracy and Total Error Band 10, 15, 20, 50, 100, 200 SLPM
Accuracy and Total Error Band

0%FS to 14.3%FS = 0.5%
14.3%FS to 100%FS = 3.5%

 Total Error Band:
0%FS to 12.5%FS = 0.5%
12.5%FS to 100%FS = 4.0%

300 SLPM only.


0%FS to 14.3%FS (0 SLPM to 43 SLPM) = 0.5%
14.3%FS to 100%FS (43 SLPM to 300 SLPM) = 3.5%

 Total Error Band:
0%FS to 14.3%FS (0 SLPM to 43 SLPM) = 0.5%
14.6%FS to 66.7%FS (44 SLPM to 200 SLPM) = 4.0%
66.7%FS to 100%FS (200 SLPM to 300 SLPM) = 7.0%

Ideal Transfer Function

Table 6. Ideal Transfer Function
Digital Output Code16384 * [0.1 + 0.8 * (Flow Applied/Full Scale Flow)]
Flow AppliedFull Scale Flow * [(Digital Output Code/16384) – 0.1]/0.8

Digital Interface

For additional details on the use of Zephyr with digital output see the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors”.

The sensor uses the I2C standard for digital communication with a slave address specified in the datasheet Nomenclature and Order Guide. Following sensor power-up, each of the first two read sequences shown in Figure 2 will respond with 2 bytes of the unique 4-byte Serial Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will respond with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor startup time before performing the first read, then allow a 10 ms command response time before performing the second read.

Sensor I2C Read and Write Sequences

I2C Read: Slave responds to Master with data
Sensor I2C Read and Write Sequences
I2C Read: Master sends data to Slave
Sensor I2C Read and Write Sequences

Sensor I2C Read and Write SequenceStart conditionMaster pulls SDA from high to low while SCL remains high
Stop conditionMaster allows SDA to float from low to high while SCL remains high
Address bitI 2C Slave Address is the 7 Most Significant Bits for the first transmitted byte
Read/write bitRead = 1, Write = 0
Data bitRead = 1, Write = 0
Slave ACKSlave pulls SDA low
Master ACKMaster pulls SDA low
Master NACKMaster allows SDA to float high

After the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading. Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be ‘00’, while non-flow responses (such as error and status codes) will begin with ‘11’. There are several user commands available as shown in Table 7. Following an I2C write sequence of a user command, the sensor will respond to the next I2C read request with a 16-bit response. Possible responses to user commands can be seen in Table 8.

User Command Descriptions

Command Byte (Hexadecimal)Command NameCommand DescriptionCommand Response Time (Max.)
0x01Get Serial NumberNext two read requests will each return two bytes of the sen- sor’s unique 4-byte Serial Number.10 ms
0x02Power On ResetForce Power-On reset of sensor microcontroller.20 ms
0x03ChecksumCalculates EEPROM Checksum and compares to production Checksum value. If the values match, the next read request will respond with 0xCCA5. Otherwise, the next read will respond with 0xCC90. 1 s

Sensor Response Descriptions

Sensor Response (Hexadecimal)Response NameResponse Description
0xCCA5POSACKnon-response command was executed successfully
0xCC99Bad Commandcommand byte was not recognized
0xCC9ABadParamcommand sent with incorrect parameter bytes
0xCC9BFailurecommand failed during execution
0xCC90Bad Check sumchecksum did not match stored value
0xCCBBBusysensor is busy calculating the checksum value

The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum supply voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 k Ohm to limit the sink current to 2 mA. The typical value for SCL and SDA pull-up resistors is 4.7 k Ohm (this value depends on the bus capacitance and the bus speed).

Mounting Dimensions (For reference only: mm [in].)

Port Style: Manifold Mount

Mounting Footprint

  1. (A) Pin 1.
  2. (B) 4X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
  3. (C) 2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm [0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durometer A65 to A80 Silicon or Viton, are required to seal sensor to manifold. O-rings are not included.
  4. (D) Flow channel

Port Style: 22 mm OD Tapered Male Fitting per ISO 5356

Mounting Footprint

  1. (A) Pin 1.
  2. (B) 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
  3. (C) 15 mm ID/22 mm OD tapered fitting per ISO 5356.

Mounting Dimensions (For reference only: mm [in], continued.)

Port Style: G 3/8 Female Threaded Fitting per ISO 1179.

Mounting Footprint

  1. (A) Pin 1.
  2. (B) 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
  3. (C) ISO 1179 G3/8, recommended torque is 1,7 ±0,6 N m [15 ±5 in-lb]. Electrical connector part number is JST (Japan Solderless Terminals) B6B-PH-K-S. Mating connector part numbers are JST PHR-6 (socket) and JST SPH-002T-P0.5L (crimp terminal).

Pinout (Digital Function)

Pin 1Pin 2Pin 3Pin 4Pin 5Pin 6

DO NOT USE these products as safety or emergency stop devices or in any other application where failure of the product could result in personal injury.
Failure to comply with these instructions could result in death or serious injury



Honeywell warrants goods of its manufacture as being free of defective materials and faulty workmanship during the applicable warranty period. Honeywell’s standard product warranty applies unless agreed to otherwise by Honeywell in writing; please refer to your order acknowledgement or consult your local sales office for specific warranty details. If warranted goods are returned to Honeywell during the period of coverage, Honeywell will repair or replace, at its option, without charge those items that Honeywell, in its sole discretion, finds defective.
The foregoing is buyer’s sole remedy and is in lieu of all other warranties, expressed or implied, including those of merchantability and fitness for a particular purpose. In no event shall Honeywell be liable for consequential, special, or indirect damages.

While Honeywell may provide application assistance personally, through our literature and the Honeywell web site, it is buyer’s sole responsibility to determine the suitability of the product in the application.

Specifications may change without notice. The information we supply is believed to be accurate and reliable as of this writing. However, Honeywell assumes no responsibility for its use.

For more information

Honeywell Advanced Sensing Technologies services its customers through a worldwide network of sales offices and distributors. For application assistance, current specifications, pricing or the nearest Authorized Distributor, visit our website or call:
Asia Pacific +65 6355-2828
Europe +44 (0) 1698 481481
USA/Canada +1-800-537-6945

Honeywell Advanced Sensing Technologies
830 East Arapaho Road Richardson, TX 75081

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Documents / Resources

Honeywell Zephyr Digital Aiflow Snesors [pdf] Installation Guide
Zephyr Digital Aiflow Snesors, 50080060, HAF Series High Accuracy, 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, 300 SLPM


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